Lagrange, SébastienSébastienLagrangeBrongersma, SywertSywertBrongersmaJudelewicz, MosheMosheJudelewiczSaerens, AnneliesAnneliesSaerensVervoort, IwanIwanVervoortRichard, EmmanuelEmmanuelRichardPalmans, RogerRogerPalmansMaex, KarenKarenMaex2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3605Self-annealing characterization of electroplated copper filmsOral presentation