Hody, HubertHubertHodyParaschiv, VasileVasileParaschivHellin, DavidDavidHellinVandeweyer, TomTomVandeweyerBoccardi, GuillaumeGuillaumeBoccardiXu, KaidongKaidongXu2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23943Gate double patterning strategies for 10nm node FinFET devicesMeeting abstracthttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1855822