A new power MEMS component with variable capacitance

Sterken, TomTomSterkenBaert, KrisKrisBaertPuers, BobBobPuersBorghs, GustaafGustaafBorghsMertens, RobertRobertMertens2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8180A new power MEMS component with variable capacitanceProceedings paper10.37665/ppQLFWW89817