Copper CMP with composite polymer core – silica shell abrasives: a defectivity study

Armini, SilviaSilviaArminiWhelan, CarolineCarolineWhelanMoinpour, MansourMansourMoinpourMaex, KarenKarenMaex2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13317Copper CMP with composite polymer core – silica shell abrasives: a defectivity studyProceedings paperhttp://www.mrs.org/s_mrs/sec_subscribe.asp?CID=12434&DID=205509