Gao, WeiminWeiminGaoKlostermann, UlrichUlrichKlostermannMülders, ThomasThomasMüldersSchmoeller, ThomasThomasSchmoellerDemmerle, WolfgangWolfgangDemmerleDe Bisschop, PeterPeterDe BisschopBekaert, JoostJoostBekaert2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18942Application of an inverse Mack model for negative tone development simulationProceedings paper