Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrast

van Dorp, DennisDennisvan DorpArnauts, SophiaSophiaArnautsLaitinnen, MikkoMikkoLaitinnenSajavaara, TimoTimoSajavaaraMeersschaut, JohanJohanMeersschautConard, ThierryThierryConardKelly, JohnJohnKelly2021-10-272021-10-2720190169-4332https://imec-publications.be/handle/20.500.12860/34211Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrastJournal articlehttps://www.sciencedirect.com/science/article/pii/S0169433218326060