The impact of Focused Ion Beam (FIB) induced electrical damage on electrical characterization

Pandey, KomalKomalPandeyParedis, KristofKristofParedisDrijbooms, ChrisChrisDrijboomsVandervorst, WilfriedWilfriedVandervorstBender, HugoHugoBender2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31473The impact of Focused Ion Beam (FIB) induced electrical damage on electrical characterizationMeeting abstract