RF/high-speed I/O ESD protection: Co-optimizing strategy between BEOL capacitance and HBM immunity in advanced CMOS process

Wu, Wei-MinWei-MinWuKer, Ming-DouMing-DouKerChen, Shih-HungShih-HungChenChen, Jie-TingJie-TingChenLinten, DimitriDimitriLintenGroeseneken, GuidoGuidoGroeseneken2021-10-292021-10-2920200018-9383https://imec-publications.be/handle/20.500.12860/36353RF/high-speed I/O ESD protection: Co-optimizing strategy between BEOL capacitance and HBM immunity in advanced CMOS processJournal article10.1109/TED.2020.2994492