Le Thomas, NicolasNicolasLe ThomasDhakal, AshimAshimDhakalPeyskens, FredericFredericPeyskensSubramanian, AnanthAnanthSubramanianClaes, TomTomClaesDe Vos, K.K.De VosRyckeboer, EvaEvaRyckeboerBockstaele, R.R.BockstaeleBienstman, PeterPeterBienstmanBaets, RoelRoelBaets2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22653Biological sensing with integrated silicon and silicon nitride photonicsProceedings paper