A new exploration of quality testing technique for the wafer-scale graphene film based on the terahertz vector network analysis technology

Chen, ChengChengChenPourkazemi, AliAliPourkazemiZhao, WuWuZhaoVan den Brande, NikoNikoVan den BrandeHauffman, TomTomHauffmanZhang, ZhiyongZhiyongZhangStiens, JohanJohanStiens2023-07-052023-02-282023-07-0520230169-4332WOS:000926833100001https://imec-publications.be/handle/20.500.12860/41201A new exploration of quality testing technique for the wafer-scale graphene film based on the terahertz vector network analysis technologyJournal article10.1016/j.apsusc.2023.156498WOS:000926833100001CONDUCTIVITYANISOTROPY