Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis

Conard, ThierryThierryConardArstila, KaiKaiArstilaHantschel, ThomasThomasHantschelFranquet, AlexisAlexisFranquetVandervorst, WilfriedWilfriedVandervorstVecchio, EmmaEmmaVecchioBauer, FrankFrankBauerBurgess, SimonSimonBurgess2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15126Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysisProceedings paper