Wet-chemical etching of ruthenium in acidic Ce4+ solution

Philipsen, HaroldHaroldPhilipsenTeck, SanderSanderTeckMouwen, NilsNilsMouwenMonnens, WouterWouterMonnensLe, Quoc ToanQuoc ToanLe2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31526Wet-chemical etching of ruthenium in acidic Ce4+ solutionProceedings paperhttp://www.dx.doi.org/10.4028/www.scientific.net/SSP.282.284