Cotrin Teixeira, RicardoRicardoCotrin TeixeiraDe Munck, KoenKoenDe MunckDe Moor, PietPietDe MoorBaert, KrisKrisBaertSwinnen, BartBartSwinnenVan Hoof, ChrisChrisVan HoofKnüttel, AlexanderAlexanderKnüttel2021-10-172021-10-1720081807-1953https://imec-publications.be/handle/20.500.12860/13563Stress analysis on ultra thin ground wafersJournal articlehttp://www.sbmicro.org.br/jics/