Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomography

Kundu, ParomitaParomitaKunduFleischmann, ClaudiaClaudiaFleischmannVan Marcke, PatriciaPatriciaVan MarckeRichard, OlivierOlivierRichardBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31096Advanced 3D characterisation of semiconductor devices: hybrid metrology correlating STEM-EDXS and atom probe tomographyProceedings paperhttp://imc19.com/cms/wp-content/uploads/IMC19-Oral-Program-06092018-1.pdf