Cost effective FinFET platform for stand alone DRAM 1Y and beyond memory periphery

Spessot, AlessioAlessioSpessotSharan, NehaNehaSharanOh, HyungrockHyungrockOhRitzenthaler, RomainRomainRitzenthalerDentoni Litta, EugenioEugenioDentoni LittaMallik, ArindamArindamMallikDe Keersgieter, AnAnDe KeersgieterParvais, BertrandBertrandParvaisSherazi, YasserYasserSheraziMachkaoutsan, VladimirVladimirMachkaoutsanKim, CheolgyuCheolgyuKimFazan, PierrePierreFazanMocuta, DanDanMocutaMocuta, AndaAndaMocutaHoriguchi, NaotoNaotoHoriguchi2021-10-262021-10-262018-01https://imec-publications.be/handle/20.500.12860/31838Cost effective FinFET platform for stand alone DRAM 1Y and beyond memory peripheryProceedings paperhttps://ieeexplore.ieee.org/abstract/document/8388823