Blauw, MichielMichielBlauwDam, Van AnhVan AnhDamCrego Calama, MercedesMercedesCrego CalamaBrongersma, SywertSywertBrongersma2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20367Atomic layer deposition of metal oxide thin films for sensing applicationsOral presentation