Kumari, SulakshnaSulakshnaKumariHaglund, Emanuel P.Emanuel P.HaglundGustavsson, Johan S.Johan S.GustavssonLarsson, AndersAndersLarssonRoelkens, GuntherGuntherRoelkensBaets, RoelRoelBaets2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26857Design of an intra-cavity SiN grating for integrated 850nm VCSELsProceedings paper