El Rifai, JoumanaJoumanaEl RifaiSedky, SherifSherifSedkyVan Hoof, RitaRitaVan HoofSeveri, SimoneSimoneSeveriLin, DennisDennisLinPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofWitvrouw, AnnAnnWitvrouw2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18870Laser annealed SiGe devices for MEMS applications at temperatures below 250CProceedings paper