Bias-induced junction displacements in scanning spreading resistance microscopy and scanning capacitance microscopy

Eyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7564Bias-induced junction displacements in scanning spreading resistance microscopy and scanning capacitance microscopyJournal article