Improved characterization of high-k degradation with vacuum C-AFM

Polspoel, WouterWouterPolspoelVandervorst, WilfriedWilfriedVandervorstAguilera, LidiaLidiaAguileraPorti, MarcMarcPortiNafria, MontserratMontserratNafriaAymerich, XavierXavierAymerich2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14328Improved characterization of high-k degradation with vacuum C-AFMProceedings paper