A review of recent work on stresses and strains in semiconductor heterostructures

Jain, SureshSureshJainWillander, M.M.WillanderPinardi, KuntjoroKuntjoroPinardiMaes, HermanHermanMaes2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1949A review of recent work on stresses and strains in semiconductor heterostructuresJournal article