Progressive breakdown in ultrathin SiON dielectrics and its effect on transistor performance

O'Connor, R.R.O'ConnorHughes, G.G.HughesDegraeve, RobinRobinDegraeveKaczer, BenBenKaczer2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10946Progressive breakdown in ultrathin SiON dielectrics and its effect on transistor performanceJournal article