Integration of silicon etched waveguides with MCM-D for V- and W-band

Ocket, IljaIljaOcketNauwelaers, BartBartNauwelaersCarchon, GeertGeertCarchonJourdain, AnneAnneJourdainDe Raedt, WalterWalterDe Raedt2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/10945Integration of silicon etched waveguides with MCM-D for V- and W-bandProceedings paper