Delabie, AnneliesAnneliesDelabieBrijs, BertBertBrijsCaymax, MattyMattyCaymaxChiarella, ThomasThomasChiarellaConard, ThierryThierryConardPuurunen, RiikkaRiikkaPuurunenRichard, OlivierOlivierRichardVan Steenbergen, JanJanVan SteenbergenTeerlinck, IvoIvoTeerlinckZhao, ChaoChaoZhaoHeyns, MarcMarcHeynsMeuris, MarcMarcMeuris2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7486ALD High-k growth on Ge substratesMeeting abstract