Ultra-thin NiGe films prepared via catalytic solid-vapor reaction of Ni with GeH4

Peter, AntonyAntonyPeterOpsomer, KarlKarlOpsomerAdelmann, ChristophChristophAdelmannSchaekers, MarcMarcSchaekersMeersschaut, JohanJohanMeersschautRichard, OlivierOlivierRichardVaesen, IngeIngeVaesenMoussa, AlainAlainMoussaFranquet, AlexisAlexisFranquetTokei, ZsoltZsoltTokeiVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-2120131944-8244https://imec-publications.be/handle/20.500.12860/22924Ultra-thin NiGe films prepared via catalytic solid-vapor reaction of Ni with GeH4Journal articlehttp://pubs.acs.org/doi/abs/10.1021/am4024719?journalCode=aamick