Xu, KaidongKaidongXuTao, ZhengZhengTaoHody, HubertHubertHodyMannaert, GeertGeertMannaertKunnen, EddyEddyKunnenMao, MingMingMaoLazzarino, FredericFredericLazzarinoDecoster, StefanStefanDecoster2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24852N10 logic patterningMeeting abstract