Schrauwen, JonathanJonathanSchrauwenVan Lysebettens, J.J.Van LysebettensClaes, TomTomClaesDe Vos, KatrienKatrienDe VosBienstman, PeterPeterBienstmanVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008-121041-1135https://imec-publications.be/handle/20.500.12860/14447Focused-ion-beam fabrication of slots in silicon waveguides and ring resonatorsJournal article