Babaei Gavan, KhashayarKhashayarBabaei GavanLazzarino, FredericFredericLazzarinoBrouri, MohandMohandBrouriTutunjyan, NinaNinaTutunjyande Marneffe, Jean-FrancoisJean-Francoisde MarneffeKunnen, EddyEddyKunnenXu, KaidongKaidongXu2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22002Effect of precoat on the sidewall profile of through silicon via'sMeeting abstract