Stress hybridization for multigate devices fabricated on supercritical strained-SOI (SC-SSOI)

Collaert, NadineNadineCollaertRooyackers, RitaRitaRooyackersDe Keersgieter, AnAnDe KeersgieterLeys, FrederikFrederikLeysCayrefourcq, I.I.CayrefourcqGhyselen, BrunoBrunoGhyselenLoo, RogerRogerLooJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11895Stress hybridization for multigate devices fabricated on supercritical strained-SOI (SC-SSOI)Journal article