van Dorp, DennisDennisvan DorpArnauts, SophiaSophiaArnautsCuypers, DanielDanielCuypersRip, JensJensRipHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23246Nanoscale etching of III-V semiconductors in acidic H2O2 solutionsMeeting abstract