Sedky, SherifSherifSedkyFiorini, PaoloPaoloFioriniLoreti, S.S.LoretiCaymax, MattyMattyCaymaxBaert, KrisKrisBaertVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3816Analysis of the structural properties of polycrystalline silicon germanium filmsProceedings paper