Zhao, LarryLarryZhaoPantouvaki, MariannaMariannaPantouvakiCroes, KristofKristofCroesTokei, ZsoltZsoltTokeiBarbarin, YohanYohanBarbarinWilson, ChrisChrisWilsonBaklanov, MikhaïlMikhaïlBaklanovBeyer, GeraldGeraldBeyerClaeys, CorCorClaeys2021-10-192021-10-1920110003-6951https://imec-publications.be/handle/20.500.12860/20222Role of copper in time dependent dielectric breakdown of porous organo-silicate glass low-k materialsJournal article