Li, YunlongYunlongLiTokei, ZsoltZsoltTokeiVan Aelst, JokeJokeVan AelstCarbonell, LaureLaureCarbonellBaklanov, MikhaïlMikhaïlBaklanovRichard, OlivierOlivierRichardBender, HugoHugoBenderGroeseneken, GuidoGuidoGroesenekenMaex, KarenKarenMaex2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12480Plasma ash modulation of TDDB thermal activation energy in damascene SiOC:HJournal article