Incorporation of nitrogen in diamond films - A new way of tuning parameters for optical passive elements

Kosowska, MonikaMonikaKosowskaPawlowska, SandraSandraPawlowskaSankaran, Kamatchi J.Kamatchi J.SankaranMajchrowicz, DariaDariaMajchrowiczHaenen, KenKenHaenenDholakia, KishanKishanDholakiaSzczerska, MalgorzataMalgorzataSzczerska2022-02-242022-02-2420210925-9635WOS:000612811800004https://imec-publications.be/handle/20.500.12860/39111Incorporation of nitrogen in diamond films - A new way of tuning parameters for optical passive elementsJournal article10.1016/j.diamond.2020.108221WOS:000612811800004ELECTRICAL-PROPERTIESSENSORS