AlGaN/GaN HEMT grown on 150 mm Silicon(111) Substrates

Cheng, KaiKaiChengLeys, MaartenMaartenLeysDegroote, StefanStefanDegrooteDerluyn, JoffJoffDerluynSijmus, BramBramSijmusFavia, PaolaPaolaFaviaRichard, OlivierOlivierRichardBender, HugoHugoBenderGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11849AlGaN/GaN HEMT grown on 150 mm Silicon(111) SubstratesProceedings paper