Sioncke, SonjaSonjaSionckeCaymax, MattyMattyCaymaxConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetHeyns, MarcMarcHeynsMeuris, MarcMarcMeurisUrbanczyk, AdamAdamUrbanczykVan Hemmen, J.L.J.L.Van HemmenKeunig, WytzeWytzeKeunigKessels, W.M.M.W.M.M.Kessels2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14487Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substratesMeeting abstract