A 300mm silicon nitride photonic platform for ultra low loss in the visible spectrum

Zhou, DiDiZhouCallori, GiacomoGiacomoCalloriVereecke, BartBartVereeckeHelin, PhilippePhilippeHelinLeyssens, KennyKennyLeyssensVecchio, EmmaEmmaVecchioMoelants, MyriamMyriamMoelants2025-06-232024-12-042025-06-2320242160-5033WOS:001327768000019https://imec-publications.be/handle/20.500.12860/44912A 300mm silicon nitride photonic platform for ultra low loss in the visible spectrumProceedings paper10.1109/OMN61224.2024.10685238979-8-3503-8492-5WOS:001327768000019