Baklanov, MikhaïlMikhaïlBaklanovVanhaelemeersch, SergeSergeVanhaelemeerschAlaerts, CarineCarineAlaertsMaex, KarenKarenMaex2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2364Plasma etching of organic low-dielectric-constant polymers: comparative analysisProceedings paper