Enabling poly- SiGe MEMS scaling by improving anchor strength and resistance

Van Hoof, RitaRitaVan HoofBryce, GeorgeGeorgeBryceClaes, GertGertClaesWitvrouw, AnnAnnWitvrouwSeveri, SimoneSimoneSeveri2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19982Enabling poly- SiGe MEMS scaling by improving anchor strength and resistanceJournal articlehttp://ees.elsevier.com/mee/