Nanometer scale carrier profiling with scanning probes

Vandervorst, WilfriedWilfriedVandervorstEyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonHantschel, ThomasThomasHantschelXu, MingweiMingweiXuClarysse, TrudoTrudoClarysse2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5783Nanometer scale carrier profiling with scanning probesOral presentation