Van Damme, JacquesJacquesVan DammeMassar, ShanaShanaMassarAcharya, RohithRohithAcharyaIvanov, TsvetanTsvetanIvanovPerez Lozano, DanielDanielPerez LozanoCanvel, YannYannCanvelDemarets, MaelMaelDemaretsVangoidsenhoven, DizianaDizianaVangoidsenhovenHermans, YannickYannickHermansLai, J. G.J. G.LaiAnanthapadmanabha Rao, VadirajVadirajAnanthapadmanabha RaoMongillo, MassimoMassimoMongilloWan, DannyDannyWanDe Boeck, JoJoDe BoeckPotocnik, AntonAntonPotocnikDe Greve, KristiaanKristiaanDe Greve2025-07-092024-10-122025-07-0920240028-0836WOS:001326921400019https://imec-publications.be/handle/20.500.12860/44631Advanced CMOS manufacturing of superconducting qubits on 300 mm wafersJournal article10.1038/s41586-024-07941-9WOS:001326921400019MEDLINE:39294381