Self-assembled monolayers as Cu diffusion barriers for advanced interconections: molecular engineering

Maestre Caro, ArantxaArantxaMaestre CaroMaes, GuidoGuidoMaesBorghs, GustaafGustaafBorghsWhelan, CarolineCarolineWhelan2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14095Self-assembled monolayers as Cu diffusion barriers for advanced interconections: molecular engineeringMeeting abstract