Inoue, FumihiroFumihiroInoueJourdain, AnneAnneJourdainPeng, LanLanPengPhommahaxay, AlainAlainPhommahaxayKosemura, DaisukeDaisukeKosemuraDe Wolf, IngridIngridDe WolfRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerSleeckx, ErikErikSleeckxBeyne, EricEricBeyne2021-10-252021-10-2520181043-7398https://imec-publications.be/handle/20.500.12860/30938Edge trimming induced defects on direct bonded wafersJournal articlehttp://electronicpackaging.asmedigitalcollection.asme.org/article.aspx?articleid=2679409