Development of a comprehensive metrology software platform dedicated to block copolymers thin film nanopatterns

Derville, A.A.DervilleLabrosse, A.A.LabrosseZimmermann, Y.Y.ZimmermannFoucher, JohannJohannFoucherSingh, ArjunArjunSinghGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25194Development of a comprehensive metrology software platform dedicated to block copolymers thin film nanopatternsProceedings paper