Dutta, ShibeshShibeshDuttaSankaran, KiroubanandKiroubanandSankaranMoors, KristofKristofMoorsPourtois, GeoffreyGeoffreyPourtoisVan Elshocht, SvenSvenVan ElshochtBoemmels, JuergenJuergenBoemmelsVandervorst, WilfriedWilfriedVandervorstTokei, ZsoltZsoltTokeiAdelmann, ChristophChristophAdelmann2021-10-242021-10-242017-070021-8979https://imec-publications.be/handle/20.500.12860/28293Thickness dependence of the resistivity of platinum-group metal thin filmsJournal articlehttp://aip.scitation.org/doi/full/10.1063/1.4992089