Vermang, BartBartVermangRothschild, AudeAudeRothschildKenis, KarineKarineKenisWostyn, KurtKurtWostynBearda, TwanTwanBeardaRacz, A.A.RaczLoozen, XavierXavierLoozenJohn, JoachimJoachimJohnMertens, PaulPaulMertensPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18284Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3Proceedings paperhttp://www.photovoltaic-conference.com/