Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures

Schulze, AndreasAndreasSchulzeLoo, RogerRogerLooRyan, PaulPaulRyanWormington, MatthewMatthewWormingtonFavia, PaolaPaolaFaviaWitters, LiesbethLiesbethWittersCollaert, NadineNadineCollaertVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-242021-10-2420170957-4484https://imec-publications.be/handle/20.500.12860/29400Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structuresJournal articlehttp://iopscience.iop.org/article/10.1088/1361-6528/aa5fbb/pdf