On the frequency-dependent capacitance and conductance of on-chip interconnects on lossy silicon substrate

Ymeri, H.H.YmeriNauwelaers, BartBartNauwelaersMaex, KarenKarenMaex2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7079On the frequency-dependent capacitance and conductance of on-chip interconnects on lossy silicon substrateJournal article