Correlation between Cu microstructure and TSV Cu pumping

De Messemaeker, JokeJokeDe MessemaekerVarela Pedreira, OlallaOlallaVarela PedreiraPhilipsen, HaroldHaroldPhilipsenBeyne, EricEricBeyneDe Wolf, IngridIngridDe WolfVan der Donck, TomTomVan der DonckCroes, KristofKristofCroes2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23710Correlation between Cu microstructure and TSV Cu pumpingProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6897349&contentType=Conference+Publications