Electrical properties of SiGe epitaxial layers for photovoltaic application as studied by scanning electron microscopical methods

Kruger, O.O.KrugerSeifert, W.W.SeifertKittler, M.M.KittlerGutjahr, A.A.GutjahrKonuma, M.M.KonumaSaid, KhalidKhalidSaidPoortmans, JefJefPoortmans2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2682Electrical properties of SiGe epitaxial layers for photovoltaic application as studied by scanning electron microscopical methodsProceedings paper